|
O2
|
99.9995％
|
N2≦1.5 O2≦1.0 H20≦1.5 總烴≦1.0
|
|
99.999％
|
N2≦4.0 O2≦2.0 H20≦3.0 總烴≦1.0
|
|
99.995 ％
|
N2≦20.0 O2≦8.0 H20≦8.0 總烴≦2.0
|
|
99.95 ％
|
N2≦280. O2≦60. H20≦20. 總烴≦10.
|
|
He
|
99.999～99.9996％
|
H2≦0. O2+Ar≦2 N2≦5 CO2≦0.5 CH4≦0.5
Ne≦0.5 CO2≦0.5 CO≦0.5 H2<3
|
|
99.99～99.995％
|
Ne<1.0 CO<1.0 CH4<1.0 CO2<1.0 O2+Ar<10 H2O<10
|
|
Ar
|
99.999％
|
N2≤5.0 O2≤2.0 H2≤1.0 CH4≤2.0 H2O≤4.0
|
|
N2
|
99．999％
|
O2≤3.0 H2≤1.0 CH4≤3.0 H2O≤5.0
|
|
H2
|
99．999％
|
N2≤5.0 O2<2.0 H2O<2.0
|
|
O2
|
99.995％
|
Ar<10.0 N2<20.0 H2O≤3.0 CO+CO2+CH4≤3.0
|
|
99.999％
|
Ar≤2.0 N2≤5.0 H2O≤2.0 CO+CO2+CH4≤1.0
|
|
CH4
|
99.995％
|
O2 (Ar)≤5.0 N2≤15.0 H2≤5.0 C2H6≤15.0 H2O≤5.0
|
|
99.99％
|
O2(Ar)≤10.0 N2≤35.0 H2≤10.0 C2H6≤25.0 H2O≤15.0
|
|
99.9％
|
O2(Ar)≤50.0 N2≤250.0 H2≤ 50.0 C2H6≤500.0 H2O≤50.0
|
|
CO
|
99.95％
|
O2≤150.0 N2≤300.0 H2O≤20.0
|
|
99.9％
|
O2≤300.0 N2≤600.0 H2O≤50.0
|
|
NH3
|
99.999％
|
O2≤2.0 N2≤5.0 CO+CO2+CH4≤2.0 H2O≤5.0 總雜質含量≤10.0
|
|
Ne
|
99.999％
|
N2<2.0 CO<0.05 He<6.0 H2O<1.0 O2+Ar<1.0 CH4<1.0
CO2<0.5 H2<1.0
|
